000 00308nam a22001217a 4500
082 _a620.5/KUM
100 _aKUMAR PHANI N.
245 _aPRINCIPLES OF NANOTECHNOLOGY MATERIALS TOOLS & PROCESS AT NANOSCALE
250 _a1ST
260 _aCHENNAI
_bSCITECH PUBLICATIONS
_c2008
300 _a13.6
942 _cBK
999 _c87187
_d87187