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| 020 | _a£9,780,130,224,040 | ||
| 035 | _a51769 | ||
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_a621.38152 _BINT / XIA |
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| 100 | _aXiao, Hong | ||
| 245 | 0 | _aIntroduction To Semiconductor Manufacturing Technology | |
| 250 | _a- | ||
| 260 |
_aNew Jersey _bPrentice Hall Inc. |
||
| 300 | _a647 | ||
| 500 | _a10273 | ||
| 650 | _aSemiconductor | ||
| 942 | _cBK | ||
| 999 |
_c79937 _d79937 |
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