000 00444nam a2200169Ia 4500
008 210723s9999||||xx |||||||||||||| ||und||
035 _a39441
082 _a621.381
_BMEM / HSU
100 _aHsu, Tai-Ran
245 0 _aMEMS & Microsystems : Design And Manufacture
250 _a-
260 _aN. Delhi
_bTata McGraw - Hill Publishing Company Limited
300 _a436
500 _a7991
650 _aElectronic Engineering
942 _cBK
999 _c41244
_d41244