000 00494nam a2200181Ia 4500
008 210723s9999||||xx |||||||||||||| ||und||
020 _a978-0-19-569327-0
035 _a45100
082 _a620.5
_BTAN
100 _aTaniguchi, Norio Ed.
245 0 _aNanotechnology : Integrated Processing Systems For Ultra Precision And Ultra Fine Producats
250 _a-
260 _aN. Delhi
_bOxford University Press
300 _a406
500 _a412
650 _aNanotechnology
942 _cBK
999 _c47478
_d47478