TY  - BOOK
AU  - Taniguchi, Norio Ed.
TI  - Nanotechnology : Integrated Processing Systems For Ultra Precision And Ultra Fine Producats
SN  - 978-0-19-569327-0
U1  - 620.5 
CY  - N. Delhi
PB  - Oxford University Press
KW  - Nanotechnology
N1  - 412
ER  -